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Nanotechnology

The Nanotechnology Group (NTG) is in the Department of Micro and Nanosciences (MNS) of Aalto University School of Electrical Engineering. The group is a member of the Micro and Nanofabrication Center MINFAB, which provides clean room and semiconductor processing facilities for research and educational purposes at Micronova.

The group is led by Professor Harri Lipsanen and it has currently about 10 researchers. Prof. Harri Lipsanen is also vice director of the department and he participates to the Board of Directors of Micronova.

Education is funded by Aalto University and research is mainly funded by external sources, especially the National Technology Agency (Tekes), the Academy of Finland and industry. Areas of current research activity in the Nanotechnology Group include a variety of topics in nanofabrication, nanomaterials and nanoscale characterisation. Applications are often found among nano-optics, nanophotonics, nanoelectronics and sensors.

Nanofabrication methods include electron beam lithography, focused ion beam lithography, atomic layer deposition (ALD), metalorganic vapour phase epitaxy (MOVPE) and other advanced deposition and dry etching processes combined with standard microfabrication techniques. Semiconductor nanostructures such as quantum dots and nanowires are also processed by self-assembly. Novel nanomaterials are developed from structures based on nanolaminates, plasmonic structures, functional nanostructures and bioinspired structures. Carbon based materials, especially graphene, are the most recent additions to the list Nanocharacterisation methods covers techniques such as scanning probe microscopy, SEM, TEM, advanced X-ray diffraction, photoluminescence and various electrical methods.

Recent doctoral dissertations:

• Jouni Tiilikainen: Novel genetic fitting algorithms and statistical error analysis methods for x-ray reflectivity analysis (2008)
• Antti Säynätjoki: Photonic crystal waveguides for silicon integrated optics (2008)
• Kai Kolari: Fabrication of silicon and glass devices for microfluidic bioanalytical applications (2008)
• Marco Mattila: Self-assembled indium phosphide nanowires (2007)
• Kimmo Solehmainen: Fabrication of microphotonic waveguide components on silicon (2007)
• Juha Riikonen: Self-assembled nanorings and stressor quantum dots (2006)
• Lauri Knuuttila: Growth and properties of compound semiconductors on germanium substrate (2006)