- Aalto University
- School of Arts,
Design and Architecture - School of Chemical Technology
- School of
Economics - School of Electrical Engineering
- School of
Engineering - School of
Science
Department of Micro- and Nanosciences
Micro and Quantum Systems
The Micro and Quantum Systems Group (MQS) is part of the Department of Micro and Nanosciences (MNT), one of the 7 departments in the Aalto University School of Electrical Engineering.
The Micro and Quantum Systems Group is a member of the Micro and Nanofabrication Center (MINFAB) of Aalto, which provides clean room and semiconductor processing facilities for research and educational purposes at Micronova.
Education is funded by Aalto University but research is mainly funded by external sources, especially the National Technology Agency (Tekes) and the Academy of Finland.
Areas of current research activity in Micro and Quantum Systems Group include:
- Micro and nanofabrication
- Microsystems and -mechanics
- Thermoelectrics
- Optically active biomolecules
The group is lead by prof. Ilkka Tittonen.
Materials Research Society - Science As Art (2009)
1st Place Winner - Nikolai Chekurov
The modern Stonehedge: Colorized SEM image of silicon nanopillar formation created by Gallium implantation and DRIE-etching.