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Personnel

Sami Franssila

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e-mail: sami.franssila [at] tkk [dot] fi
mobile: +358 50 536 1699
phone (mat. office)  +358 9 470 22727
fax. +358 9 470 26080
Room 2169 in Micronova, Tietotie 3
Room 246 in Department of Materials Science and Engineering, Vuorimiehentie 2

Research:

  • microfabrication
  • microfluidics
  • chemical microsystems
  • thin film technology

Teaching:

  • Microsystems technology (fall term)  S-129.3210
  • Microfluidics and BioMEMS (spring term) S-129.3001
  • Silicon microtechnology (spring term 2009 graduate level course) S-69.4114L
  • Personal assignments in micro- and nanotechnology, S-129.4000L

Biography: 

Sami Franssila holds BSc and MSc degrees in physics and chemistry from University of Helsinki and a PhD in electrical engineering from Helsinki University of Technology (1995). He has worked at VTT, IMEC and since 1998 at Helsinki University of Technology. His research has dealt with CMOS, MEMS, and most recently with microfluidic devices. He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written a textbook “Introduction to Microfabrication” (John Wiley & Sons, 2004).

Kestutis Grigoras

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Researcher, PhD
Email Address: kestas.grigoras [at] tkk [dot] fi
Phone: +358 9 470 24637
Room 2170

Research:

  • Porous silicon

Teaching:

  • S-129.3220 Microsystems Lab course

Biography: 

Kestutis Grigoras, born in 1958, received his PhD in 1992 from Vilnius University, Lithuania. He was working as a senior research associate in Semiconductor Physics Institute in Vilnius, Lithuania, then as a research scientist in Microelectronics Centre, Helsinki University of Technology, Finland. From 2006 he is a senior scientist at the Microfabrication group in Department of Micro and Nanosciences of Helsinki University of Technology, Finland. The current fields of interest cover atomic layer deposition (ALD), application of carbon nanotubes for microelectronics, formation of porous silicon and its application in microfluidics. He is a author or coauthor of more than 30 articles in refereed international journals.

Lauri Sainiemi

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Researcher, D.Sc. (Tech.)
Email Address: lauri.sainiemi [at] tkk [dot] fi
Phone: +358 9 470 26071
Mobile: +358 50 309 9799
Room 2159

Research:

  • Silicon micro and nanofabrication
  • Cryogenic DRIE
  • Miniaturized ionization chips for mass spectrometry
  • Nanostructured materials

Teaching:

  • S-129.3210 Microsystems Technology course assistant
  • S-129.3220 Microsystems Lab course assistant

Biography:

Lauri Sainiemi received his M.Sc. degree in electrical engineering in 2006 and his PhD degree with distinction (topic: Cryogenic deep reactive ion etching of silicon micro and nanostructures) in 2009 at Helsinki University of Technology. The focus of his research is currently on fabrication of silicon based microfluidic and MEMS devices and nanostructured materials.

Susanna Aura

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Researcher, M.Sc.
Email Address: susanna.aura [at] tkk [dot] fi
Phone: +358 9 470 24676
Room 2159

Research:

  • Polymer micro and nanofabrication
  • ORMOCER hybrid material
  • UV-embossing

Teaching:

  • S-129.3210 Microsystems technology course assistant
  • S-129.3220 Microsystems lab course assistant

Biography:

Susanna Aura graduated in electronic engineering at the Helsinki University of Technology in 2006. She is currently a PhD student at the Helsinki University of Technology. Her research interest is micro- and nanofabrication of fluidic devices.

Ville Jokinen

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Researcher, M.Sc.
Email Address: vpjokine [at] cc [dot] hut [dot] fi
Phone: +358 9 470 24986
Room 2159

Research:

  • Surface engineering, esp. biomolecular interactions
  • Capillarity and wetting
  • Surfaces and devices for desorption ionization (MALDI, DIOS)
  • Polymer microfabrication

Teaching:

  • S-129.3210 Microsystems technology course assistant

Antti J. Niskanen

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Researcher, M.Sc.
Email Address: antti.niskanen [at] tkk [dot] fi
Phone: +358 9 470 22319
Room 2173

Research:

  • Thin films (ALD, thermal oxidation, PECVD, LPD)
  • Optical lithography
  • Electron microscopy
  • Electrochemical sensors

Biography:

Antti J. Niskanen received his M.Sc. degree in Chemical Engineering from Laboratory of Inorganic Chemistry in 2002. He is currently working towards PhD degree at Department of Micro and Nanosciences, in collaboration with the Laboratory of Analytical Chemistry (prof. Sakari Kulmala). His current research focuses on fabrication and materials for electrochemiluminescent sensors suitable for microanalytical systems and point-of-care analysis.

Gianmario Scotti

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Researcher, M.Sc.
Email Address: gianmario.scotti [at] tkk [dot] fi
Phone: +358 9 470 24689
Room 2159

Research:

  • Micro Fuel Cells
  • Microfluidics

Teaching:

  • S-129.3210 Microsystems technology course assistant

Biography:

Gianmario Scotti received a M.Sc. in electrical engineering (electronics and telecommunication systems) in 1995 at the Novi Sad Faculty of Technical Sciences. He is studying towards a Ph.D. and his main research area is micro fuel cells.

Pia Suvanto

 

Research assistant, B.Sc.
Email Address: pksuvant [at] cc [dot] hut [dot] fi
Room 2159

Research:

  • Hot embossing