- Aalto University
- School of Arts,
Design and Architecture - School of Chemical Technology
- School of
Economics - School of Electrical Engineering
- School of
Engineering - School of
Science
Department of Micro- and Nanosciences
Microfabrication group
Check out our list of special assignments (erikoistyöaiheita)!
Microfabrication group develops materials and fabrication processes for a wide variety of micro- and nanodevices: fluidic, chemical and biosystems, thermal devices, flexible electronics and fuel cells.
Both silicon, glass and polymer materials and fabrication techniques are being studied, especially patterning (thick resist lithography, hot embossing/imprinting, casting, focussed ion beam FIB, discharge patterning), etching (DRIE, electrochemical, wet anisotropic), thin film deposition (ALD, PECVD, sputtering, evaporation), surface treatments (plasma, spin coating) and wafer bonding (anodic, fusion, adhesive).
Nanoporous materials and nanopillars have been applied to chemical sample treatment and analysis (laser desorption ionization, biomolecule trapping, surface microfluidics). Various spray and nozzle chips have been made for mass spectrometry interfacing (ESI, APCI, APPI), separation systems for small molecules and proteins (CE, ITP, IEF, SDS-PAGE). Various microchannel structures have been made for handling micro- and nanobeads. Biosensors based on hot electron tunneling electrochemiluminescence (ECL) are being studied. Suspended structures (microbridges and microhotplates) have been made for both high temperature and cryogenic applications. Carbon nanotube electronics has been processed on Kapton substrates.
Our microfluidics work concentrates on materials, surfaces and interconnects. We have studied capillary flow and heat transfer issues, surface modification technologies for wetting and adsorption engineering, gas and liquid interfacing with chips as well as simulations of flow and heta transfer in microfluidic chips.
Our expertise is in micro- and nanofabrication, and we actively collaborate with various chemistry, biology and other groups on devices and applications:
University of Helsinki
- Division of Pharmaceutical Chemistry
- Laboratory of Analytical Chemistry
- Protein Chemistry Unit
- Center for Drug Research
- Electronics Research Unit
- Laboratory of Inorganic Chemistry
Helsinki University of Technology
- Laboratory of Analytical Chemistry
- Low Temperature Laboratory
- Automation Technology Laboratiry
- Applied Thermodynamics Laboratory
- Physical Chemistry Laboratory
VTT
- Biotechnology
- Microsensing and Microelectronics
Tampere University of Technology
- Aerosol Physics Laboratory
University of Turku
- Biophysics laboratory
Nokia Research Center
CSC- Scientific Computing Ltd.
We have additionally joint publications with various other institutions, including Imperial College (London), Agilent (Waldbronn, Germany), Accelerator Laboratory (U. Helsinki), Crime Laboratory (National Bureau of Investigations, Vantaa, Finland), VTT Process technology, Finnish Environment Institute, University of Oulu Dept. of Physical Sciences, University of Kuopio Dept. of Pharmaceutical Chemistry, Labmaster Ltd.
STAFF:
The group consists of 2 PhDs, 6 PhD students plus a few MSc thesis students.
MAJOR FACILITIES AND EQUIPMENT:
Microfabrication group utilizes Micronova cleanroom facilities for processing on 100 mm substrates. Post-processing with novel and non-standard materials is carried out in MEMS and Thin Film labs outside the cleanroom.
MORE INFORMATION: http://micronova.tkk.fi/
Contact sami.franssila [at] tkk [dot] fi, +358 50 536 1699